All-dielectric micromachined calorimeter for high-resolution microwave power measurement

Type
Conference Paper
Year of Publication
2002
Authors
Jander, A.
Moreland, J.
Kabos, P.
Journal
Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical SystemsTechnical Digest.
Publisher
IEEE
DOI
10.1109/MEMSYS.2002.984351